Program overview
Cleaning machine is the surface treatment of silicon wafer equipment, whose the main role is removing contaminants on silicon wafer surface and their own oxides, to get the wafer in line with the requirements of cleanliness
Our solution
Program Features
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Production capacity improved
EtherCat network , improve the production capacity of the entire cell equipment process
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High coincidence accuracy
High precision, high response positioning，Ensure the accuracy of transplanting flower basket in each slot
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