Program overview
制绒刻蚀上下料机是对要经过制绒工艺的硅片进行上下转移的装置。
Our solution
Program Features
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Integrated loading and unloading
Transfer and load the silicon wafers in the flower basket to the texturing/etching process host, and transfer the etched or texturing silicon wafers into the silicon wafer flower basket
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High reliability
X3EB EtherCat servo enables high speed and gentle operation for high precision positioning
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